Application of Plasma Processes to Vlsi Technology / Takau (ed.) Sugano

Public ISBD Title : Application of Plasma Processes to Vlsi Technology Material Type: printed text Authors: Takau (ed.) Sugano Publisher: New York : John Wiley & Sons Publication Date: 1985 Pagination: 394p. , Includes Index ISBN (or other code): 978-0-471-86960-3 Languages : (Eng) Keywords: Semiconductor-Etching  Integrated Circuits  Very Large Scale-Integration-Design And Construction  Plasma Etching  Vapour Plating Class number: 621.3 Application of Plasma Processes to Vlsi Technology [printed text] / Takau (ed.) Sugano . - New York : John Wiley & Sons, 1985 . - 394p. , Includes Index. ISBN : 978-0-471-86960-3 Languages : (Eng) Keywords: Semiconductor-Etching  Integrated Circuits  Very Large Scale-Integration-Design And Construction  Plasma Etching  Vapour Plating Class number: 621.3

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Barcode	Call number	Media type	Location	Section	Status
2220	621.38173 SUG	Book	nast	CIR	Available