Title :	Application of Plasma Processes to Vlsi Technology
Material Type:	printed text
Authors:	Takau (ed.) Sugano
Publisher:	New York : John Wiley & Sons
Publication Date:	1985
Pagination:	394p. , Includes Index
ISBN (or other code):	978-0-471-86960-3
Languages :	(Eng)
Keywords:	Semiconductor-Etching  Integrated Circuits  Very Large Scale-Integration-Design And Construction  Plasma Etching  Vapour Plating
Class number:	621.3

Application of Plasma Processes to Vlsi Technology [printed text] / Takau (ed.) Sugano . - New York : John Wiley & Sons, 1985 . - 394p. , Includes Index.
ISBN : 978-0-471-86960-3
Languages : (Eng)

Keywords:	Semiconductor-Etching  Integrated Circuits  Very Large Scale-Integration-Design And Construction  Plasma Etching  Vapour Plating
Class number:	621.3